Description
Physical design of microelectromechanical systems (MEMS) and microfabricated sensors and actuators. An overview of thin and thick film processes and micromachining techniques will provide fabrication background. Device design including piezoresistive, piezoelectric, electromagnetic, thermal, optical, and chemical sensors and actuators.
Reference text in its original language
Physical design of microelectromechanical systems (MEMS) and microfabricated sensors and actuators. An overview of thin and thick film processes and micromachining techniques will provide fabrication background. Device design including piezoresistive, piezoelectric, electromagnetic, thermal, optical, and chemical sensors and actuators.
Sources and references
Dates and sources are retained to help you verify the information. Translations are provided to facilitate reading; the official source governs conditions and requirements.
Source reference : https://calendar.carleton.ca/grad/courses/ELEC/